Piezoelectric thin film analysis
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4 point bending technique
Full test structure fabrication
Mapping over the wafer
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Large and small signal
Full test structure fabrication
Mapping over the wafer
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From mHz to GHz
Full test structure fabrication if needed
C-V and P-V loops
Large and small signal measurement
Microstructural thin film analysis
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EDAX
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XRD
SEM
TEM
FIB
Ceramic pallet analysis